Abstract
The innovative characteristics of the cryogenic single-component micro-nano solid nitrogen (SN_2) particle production using super adiabatic Laval nozzle and its application to the ultra-high heat flux cooling process are investigated by a new type of integrated measurement coupled computational technique. Furthermore, cooling characteristics and impingement behavior of cryogenic micro-solid nitrogen (SN_2) particles in relation to a heated wafer substrate were investigated for application to next generation cooling technology. It is especially found that high-speed ultra-fine SN_2 particle is continuously generated due to the freezing of liquid nitrogen (LN_2) droplet induced by rapid adiabatic expansion of subsonic subcooled two-phase subcooled nitrogen flow passing through the Laval nozzle.
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