Abstract
This paper presents molecular dynamics simulation on nanoindentation of diamond indenter on a copper workpiece. Surface damages of the workpiece are caused in the contact detection process for ultra-precision fabrication and form measurement of surface by using a force sensor-integrated fast tool servo. Molecular dynamics simulations are carried out in this paper to theoretically investigate the geometries of the damages due to the contact deformation. Taking into consideration of the holding period at the maximum indentation depth between the loading and the unloading processes, the dependence of the indentation geometry on the holding time are observed. Based on the simulation results, physical properties of the workpiece are also analyzed.
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