Abstract
We studied the microstructure and magnetic property of the pulsed DC magnetron sputtered Zn 0.8 Co 0.2 O film as a function of substrate temperatures. The X-ray patterns of the Zn 0.8 Co 0.2 O film showed a strong (002) preferential orientation at 500℃. The films with a crystallite size of 23-35 ㎚ were grown in the form of nano-sized structure and this tendency was remarkable with increasing substrate temperature. The UV-visible result showed that the Zn 0.8 Co 0.2 O film prepared above 300℃ has a high optical transmittance of over 80% in the visible region. The absorption bands were observed due to sp-d interchange action by Co²? complex ion and d-d transition in the region from 500 to 700 ㎚. The resistivity of the film was below 10?¹ Ω-㎝ above 300℃. The AGM analysis resuits for the all films showed the magnetic hysteresis curves of ferromagnetic nature. The low electrical resistivity and room temperature ferromagnetism of ZnCoO thin films deposited above 300℃ suggested the possibility for the application to Diluted Magnetic Semiconductors (DMSs).
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