Abstract
In previous report, magnetostrictive susceptibility of Sm-Fe thin film was increased with small addition of carbon and nitrogen. However, excessive addition of carbon and nitrogen amount cause decreasing of megnetostrictive susceptibility and saturated magnetostriction. In this study, Sm-Fe/Sm-Fe-C-N multilayer thin film was prepared by d.c. magnetron sputtering process. The highest saturated magnetostriction of Sm-Fe/Sm-Fe-C-N multilayer thin film was -800 ppm and highest magnetostrictive susceptibility was 26 ppm/kAm-1 shown at Rt=0.5 Sm-Fe-C-N film thickness ratios.
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