다결정 SiC 마이크로 공진기의 제작과 그 특성

Abstract

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the long cantilevers, the fundamental frequency appeared at . The and long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.