Abstract
This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with <TEX>$60{\sim}100{\mu}m$</TEX> lengths, <TEX>$10{\mu}m$</TEX> width, and <TEX>$0.4{\mu}m$</TEX> thickness were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonant frequency was measured by a laser vibrometer in vacuum at room temperature. For the <TEX>$60{\sim}100{\mu}m$</TEX> long cantilevers, the fundamental frequency appeared at <TEX>$373.4{\sim}908.1\;kHz$</TEX>. The resonant frequencies of doubly clamped beam with lengths were higher than simulated results because of tensile stress. Therefore, polycrystalline 3C-SiC doubly clamped beam micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.
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