Abstract
In this research, the P(VDF-TrFE) copolymer thin films were prepared by the physical vapor deposition and studied to their piezoelectric properties. In the case of a specimen produced by varying the deposition temperature from to , its piezoelectric coefficient() increased from 32.3pC/N to 36.28pC/N, and piezoelectric voltage coefficient() from to . On the basis of these experimental results, we concluded that the P(VDF-TrFE) copolymer thin film prepared at showed the optimum piezoelectric properties. At the deposition temperature of , its piezoelectric coefficient(d33) decreased 25.3 pC/N and piezoelectric voltage coefficient() .
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