통합제진마운트용 MR 댐퍼의 실험적 성능 평가

Abstract

This paper presents experimental performance evaluation of a magnetorheological(MR) damper for integrated isolation mount for ultra-precision manufacturing system. The vibration sources of the ultra-precision manufacturing system can be classified as follows: the one is the environmental vibration from the floor and the other is the transient vibration occurred from stage moving. The transient vibration occurred from the stage moving has serious adverse effect to the process because the vibration scale is quite larger than other vibrations. Therefore in this research, a semi-active MR damper, which can control the transient vibration, is adopted. Also the stage needs to be isolated from tiny vibrations from the floor. For this purpose, a dry-frictionless MR damper is required. In order to achieve this goal, a novel type of MR damper is originally designed and manufactured in this work. Subsequently, the damping force characteristics of MR damper are evaluated by simulation and experiment. In addition, the vibration control performance of the MR damper associated with the stage mass is evaluated.