Abstract
The purpose of this study is to recover at least 1,700 kg/hr of methylene chloride with a purity of 99.9 % or higher from waste organic solvents discharged after being used as a cleaning agent in semiconductor and display manufacturing processes, and the moisture content of the final porduct is less than 1 ppm by changing the variables such as the feed stage of raw matrial and DMSO, reflux ratio. Its final purpose is to design an optimal extractive distillation process system. Based on the analysis results, it turned out that the optimum feed stage for introducing raw materials(Waste organic solvent) into the extractive distillation column(T-01) is the 65th stage. As a result of analyzing the heat duty of re-boiler and the purity of MC, the MC recovery flow rate, the water concentration, etc. to select the optimum feed stage and the optimum inflow flow rate of DMSO, it turned out that the optimum feed stage of DMSO is the third stage and the optimum inflow flowr ate of DMSO is 1 ,2000 k g/hr. As a result of analyzing the purity of MC and the MC recovery flow rate according to the reflux ratio of the extractive distillation column(T-01), it was found that when the reflux ratio is 3.5, the purity of MC could be maintained 0.999 as Mass fraction and the MC recovery flow rate is maximum.
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