Abstract
The ferroelectric and piezoelectric properties of lead zirconate titanate thin films deposited on a (La0.8,Sr0.2)MnO3(LSMO)∕Ti-metal foil heterostructure are reported. The results are compared to those of films of similar thickness deposited on platinized silicon substrate. It is shown that the films deposited on LSMO∕Ti are characterized by square ferroelectric and piezoelectric hysteresis loops with high remnant polarization and strain of 26μC∕cm2 and 0.8%, respectively. The effective piezoelectric strain constant, d33, obtained for films deposited on platinized silicon amounts to 103pm∕V. The piezoelectric behavior of the film deposited on LSMO∕Ti is analyzed in terms of a unimorph bending actuator. The extracted effective piezoelectric strain constant, d33, amounts to approximately 600pm∕V.
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