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Open Accesshttps://doi.org/10.3131/jvsj2.59.245
Copy DOI Journal: SHINKU |  Publication Date: Jan 1, 2016 |
 Citations: 2 |  License type: free |
Affiliation: Ulvac (Japan)高安定性と長寿命を実現した熱陰極電離真空計「G-TRANシリーズST2」
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