Abstract
A literature review starting from 1950 is given on the design and geometry of ionisation gauge types with hot cathodes. Considerations on the material of the electrodes and of surface effects are included. The review focuses on the design issues for measurement accuracy, linearity, repeatability, reproducibility, and stability of sensitivity. Also, the attempts to reduce the lower measurement limit are reviewed to some extent.
Highlights
The ionisation gauge [1] is the measuring instrument for high and ultrahigh vacuum, and besides the rarely applicable spinning rotor gauge the only vacuum gauge type for this pressure range
A review of the pertinent literature starting at a time, when the so-called Bayard-Alpert gauge (BAG) was invented, was undertaken which is presented in this report
In the 1960s very few papers discussed the geometry of BAGs or other hot cathode ionisation gauge” (HCIG), and even fewer made a systematic investigation of how the position of electrodes would change the sensitivity
Summary
The ionisation gauge [1] is the measuring instrument for high and ultrahigh vacuum, and besides the rarely applicable spinning rotor gauge the only vacuum gauge type for this pressure range. The ISO Technical Committee 112 for Vacuum Technology requested research for a standardized ionisation gauge suitable for calibration purposes with some emphasis on a stable relative gas sensitivity factor in the range from 10À 6 Pa to 10À 2 Pa. The European project EMPIR 16NRM05 joining 5 National Metro logical Institutes, CERN, the Nova University of Lisbon and two gauge manufacturers carry out such research. Either a controlled electron emission current from a hot cathode or a discharge current in a plasma is used for electron generation. The latter type is usually called “cold cathode (ionisation) gauge” or "crossed field ionisation gauge" as defined in ISO 3529–3:2014, the first “emitting cathode ionisation gauge” (ISO 3529–3:2014). It is 1 Torr 1⁄4 1,33322 mbar 1⁄4 133,322 Pa
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