Плёнки FeZrN: статические и СВЧ магнитные свойства

Abstract

The phase-structural state, magnetic structure parameters, static and microwave magnetic properties of Fe81 – 74Zr2 – 5N17 – 21 films prepared by reactive magnetron deposition were studied. As the Zr and N contents increase, the film structure changes from, so-called, mixed structure (grain size 3 – 6 nm of nanocrystalline α-Fe(Zr,N) + fcc nitride) to amorphous one. The film magnetic structure parameters (effective anisotropy field of stochastic domains D1/2〈Ha〉 = 11.8 ± 8 Oe and effective local anisotropy field D1/2Ha = 880 ± 700 Oe), saturation magnetization Ms (1.8 ± 0.3 T), coercive field Hc (11 ± 2 Oe), and the real permeability µ′ (80 ± 30), retaining its value at frequencies up to 3 GHz, were determined. The values of the initial permeability µ0 (70 ± 21) obtained from the hysteresis and the real permeability µ′ (80 ± 30) obtained from microwave measurements are in good agreement. The correlation between the static magnetic properties, the stochastic magnetic structure parameters and the real permeability µ′ was considered. There is no any sign on ferromagnetic resonance in the studied frequency range. However the Acher’s coefficient value (less than 0.38) for this frequency range indicates the possibility of ferromagnetic resonance at higher frequencies.