Abstract

Fe2O3 nano particle were prepared by simple hydrothermal method and coated on IDT (inter dijital transduser) by spin coating for sensor measurement. The synthesized α-Fe2O3 nano particles were characterized by XRD and SEM. XRD pattern and SEM micrographs for as-deposited thin film sample consists of pure hexagonal α-Fe2O3 nano structure. The sensitivity, response time and recovery time of α-Fe2O3 coated thin films were studied for different gases such as methanol, butanol, ethanol, IPA, benzene, xylene, and toluene. It is shown that Fe2O3 based sensor obviously sensitive to toluene from other gases at room temperature.

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