Abstract
Abstract Effect of valve conductance on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSimMulti simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of vacuum valve were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust valves. Variation of valve diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of valve had the superior vacuum characteristics among the modeled systems. Key Words : vacuum valve, vacuum characteristics, vacuum system, simulation * 정회원, 인천대학교 신소재공학과접수일자 2012년 3월 20일, 수정완료 2012년 4월 10일게재확정일자 2012년 4월 13일Received: 20 March 2012 / Revised: 10 April 2012 /Accepted: 13 April 2012
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