Abstract
For the first time, the impurity composition of GeF4 with a natural content of isotopes and isotopically enriched was studied by chromato-mass spectrometry using adsorption capillary columns. For the identification and determination of impurity substances, their preliminary cryogenic concentration is proposed. Information on the impurity composition of germanium tetrafluoride of various isotopic composition has been expanded. The presence of permanent gases, limiting and unsaturated C3–C9 hydrocarbons, freons, alkylfluorosilanes, fluorochlorogermanes, silicon tetrafluoride, germanium tetrachloride. A total of 32 impurity substances were identified, 29 of which were discovered for the first time.
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