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Abstract
This paper presents a new class of magnetic microsensors based on the Hall effect in AC microplasma. In the theoretical study, we develop a simple model of the plasma Hall sensor and express the plasma Hall voltage as a function of magnetic field,plasma discharge field, pressure, and electrode geometry. On this basis, we have designed and fabricated magnetic microsensors using Ac neon plasma. In the experiment, we have measured the Hall valtage output of the plasma microsensors for varying five different conditions, including the frequency and the magnitude of magnetic field, the frequency and the magnitude of plasma discharge valtage, and the neon pressure.The fabricated magnetic microsensors show a magnetic field sensitivity of 8.87±0.18mV/G with 4.48% nonlinearity.
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