Abstract
The paper presents the results of the control of air leaks into a vacuum system and the dependence of its value on the parameters of the leak hole. To obtain these data, an experimental installation based on a capacitive pressure sensor was created. The process of air leak into the vacuum system through various calibrated holes is experimentally investigated. It is established that the change in the air pressure in the system can be described by an exponential function. Moreover, the nature of the leakage for all holes is the same, only the value of the exponent changes, which depends on the parameters of the hole. Analysis of the obtained data showed that this parameter decreases with increasing hole length and increases with increasing its cross-sectional area.
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