Abstract

We developed a very sensitive high-frequency carrier-type magnetic field sensor with a sub-pT resolution using a resonating transmission line. Meander-type sensor elements using amorphous CoNbZr films were fabricated. We obtained a magnetic field resolution of 7.4 x 10-13 T/Hz1/2 at 501 kHz. The detectable magnetic field was limited bythe noise caused by nonlinear magnetic excitation. We analyzed the quality factor of the resonance for enhancementof the signal-to-noise ratio.

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