Abstract
We developed a very sensitive high-frequency carrier-type magnetic-field sensor with a sub-pT resolution using a transmission-line-type sensor. Meander-type sensor elements using amorphous CoNbZr films (4μm in thickness), Cu conductor with a meander pattern (30 mm in length, 1.0 mm in width, 18 μm in thickness), and a ground plane were fabricated. We obtained a magnetic field resolution of 9.1×10-13 T/Hz1/2 at 1 Hz. The detectable magnetic field was limited by the 1/f noise. We detected a magnetocardiogram (MCG) signal of heartbeats with the sensor.
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