Abstract
A study was made of the structure and properties of Co-Al-O-based films prepared by RF magnetron reactive sputtering using oxygen and argon gases. Among Co-O-based films, only those with Al show soft magnetic properties.The Co-Al-O-based films have an electrical resistivity of about 1000μΩcm, a magnetic anisotropy field of about 80 Oe, and magnetic induction of about 10 kG. As a result they exhibit a remarkable frequency response of the permeability up to around 500 MHz. TEM observaion revealed that soft magnetic Co-Al-O films have a granular structure, where the grain is finer than 5 nm in diameter and the intergrain is extremely thin. The soft magnetic properties of these films are strongly related to their structure, which is attributed to the difference in heat of formation (viz. binding energy) between Co-O and Al-O.
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