Abstract
Surface composition changes of Au-Cu alloys sputtered with 2 keV Ar ions were observed with low energy Auger spectra and ion radiation-enhanced diffusion (IRED) coefficiemts were obtained and Ion radiation-enhanced segregation (IRES) at the surface was estimated.The simulation of sputtering including IRED and IRES was also perfomed using experimental results. This shows clearly that the IRES plays an important role in composition changes at the surface and subsurface of ion sputtered alloys.Composition changes of Au-Cu thin film alloys prepared by the co-evaporation technique were also observed following sputtering with Ne, Ar and Kr. The coevaporated film composition was preserved during sputtering at low temperature (< -120°C).
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