Abstract
Surface compositional changes of Au−Cu alloys sputtered with 2 keV Ar ions were observed with low energy Auger spectra, and the real composition, for which the escape depth and distribution of Auger electrons were corrected, was obtained with a deconvolution method. The surface composition was drastically changed by ion radiation-enhanced segregation (IRES) or radiation-enhanced Gibbsian segregation (REGS) and ion radiation-enhanced diffusion (IRED). The simulation of sputtering including REGS and IRED was also performed using experimental results. However, it was found that the surface composition and subsurface depth profiles depend on the segregation model. This effect comes from the small escape depth (a few ångström) of sputtered atoms. This shows, that the model of segregation and ejected depth of sputtered atoms are important factors in surface composition change.
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