Abstract
A compact switch/relay with excellent high frequency performance at around 2GHz is developed by adopting a novel non-linear spring structure and high frequency signal line structure.The non-linear spring system applied to an electrostatic actuator of RF MEMS switch/relay increases restoration force for switching reliability. The maximum restoration force can be three times higher than that of a linear spring system actuator. No failure due to restoration force shortage is observed during switching test up to 100 million cycles. The present RF MEMS switch/relay has been shown competitive RF performance over conventional RF switches such as PIN diodes and GaAs MMIC both by the experimental results.
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