Abstract
We fabricated nano-templates by low temperature BCP(block copolymer) process at 180 <TEX>$^{\circ}C$</TEX>, then we deposited 10 nm-thick <TEX>$TiO_2$</TEX> layers with ALD(atomic layer deposition) at low temperature of 150 <TEX>$^{\circ}C$</TEX>. Through FE-SEM analysis, we confirmed the successful formation of the groove-type(width of crest : 30 nm, width of trough : 18 nm) and the cylinder-type(diameter : 10 nm, distance between hole : 25 nm) templates. Moreover, after <TEX>$TiO_2$</TEX>-ALD processing, we confirmed the deposition of the uniform nano layers of <TEX>$TiO_2$</TEX> on the nano-templates. Through AFM analysis, the pitches of the crest-through(in groove-type) and hole-hole(in cylinder-type) were the same before and after <TEX>$TiO_2$</TEX>-ALD processing. In addition, we indirectly determined the existence of the uniform <TEX>$TiO_2$</TEX> layers on nano-templates as the surface roughness decreased drastically. We successfully fabricated nano-template at low temperature and confirmed that the three-dimensional nano-structure for sensor application could be achieved by <TEX>$TiO_2$</TEX>-ALD processing at extremely low temperature of 150 <TEX>$^{\circ}C$</TEX>.
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