Abstract
10 mTorr의 이하의 저압조건에서는 비 충돌에 의한 anomalous skin effect 과정이 반드시 고려되어 한다는 것이 선행 연구 결과를 통해 학술적으로 입증된 바 있다. 그러나 단면적이 0인 필라멘트 타입의 전류 모델을 적용했기 때문에 안테나 중심에서 전기장이 무한대가 되는 비 물리적인 현상이 발생하게 되는 문제가 있다. 따라서 본 연구에서는 단면이 유한한 표면 전류 모델을 적용하여 안테나 영역에서의 전기장을 계산하였으며, 필라멘트 타입의 전류 모델을 적용했을 때와 여러 조건에서 비교하였다. In previous study, it was reported that the anomalous skin effect should be considered in the low pressure condition(<10 mTorr). However there is the problem that the filament type antenna model of which size is 0 makes the non-physical phenomena that the electric field at the antenna point is infinite. Therefore, in this work, using the surface current model the electric field in antenna region is calculated and compared with the case of filament type antenna model in various conditions.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
