Abstract
Nonmonotonic spatial decay in electric field and space current distributions was recently observed in weakly collisional plasmas. The anomalous skin effect is found to be responsible for this phenomenon. Based on our proposed self-consistent analytic model, we successfully modeled the nonmonotonic spatial decay effect in inductively coupled plasma sources. The simulated spatial distribution of the induced E-field is compared to the measurements for different applied RF powers. Quantitative agreements for the electric field and qualitative agreement for the induced space current are achieved between the simulated and measured data. Also demonstrated is that the RF power and the reactor geometry such as the shield height has a direct impact upon the anomalous skin effect and its skin depth.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
