Abstract
The evaluation of plasma resistance and the characteristics of yttria ceramics fabricated by calcination yttria as a starting material without dopants under an oxidation atmosphere was investigated. Regardless of the starting materials, as-received, and calcined yttria powder, XRD patterns showed that all samples have Y₂O₃ phase. The three cycling process inhibited a large grain, which occurs frequently during the yttria sintering, and a high density ceramic with a homogeneous grain size was obtained. The grain size of the sintered ceramic was affected by the starting powders. The smaller the grain size, the larger were the Young’s modulus and K IC . Compared to Al₂O₃ and ZrO₂ ceramics, yttria ceramics showed a 3 times larger plasma resistance and a 1.4 ~ 2.2 times lower weight loss during the plasma etching test, respectively.
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