Fabrication of Plasma Resistant Y2O3-Al2O3-SiO2 Coating Ceramics by Melt-Coating Method

Abstract

This study is aimed at improving the plasma resistance of Al2O3 ceramics on which plasma resistant YAS(Y2O3- Al2O3-SiO2) frit is melt-coated using a simple heat-treatment process. For this purpose, the results of phase analysis and microstructural observations of the prepared YAS frits and the coating layers on the Al2O3 ceramics according to the batch compositions are compared and discussed with regard to the results of plasma resistance test. The prepared YAS frits consist of crystalline or amorphous or co-existing crystalline and amorphous phases according to the batch compositions, depending on the role and content of each raw material. The prepared YAS frit is melt-coated on the densely sintered Al2O3 ceramics, resulting in a dense coating layer with a thickness of at least ~ 80 m. The YAS coating layer consists of crystalline YAG(Y3Al5O12), Y2Si2O7, and Al2O3 phases, and YAS glass phase. Plasma resistance of YAS coated Al2O3 ceramics is strongly dependent on the content of the YAG(Y3Al5O12) and Y2Si2O7 crystalline phases in the coating layer, especially on the content of the YAG phase. Comparing the weight loss of YAS coating ceramics with values obtained for commercial Y2O3, Al2O3, and quartz ceramics, the plasma resistance of the YAS coating ceramics is 6 times higher than that of quartz, 2 times higher than that of Al2O3, and 50 % of the resistance of Y2O3.