Abstract
The study has been designed to develop water vapor supply for semiconductor industry, industrial gas manufacturing, impurities analysis, and fuel cell. Water concentration in air reached <TEX>$1019{\mu}mol/mol$</TEX> at dew temp (<TEX>$-20^{\circ}C$</TEX>) and water concentration in CO2 reached <TEX>$127{\mu}mol/mol$</TEX> at dew temp (<TEX>$-40^{\circ}C$</TEX>. Carbon dioxide needs more wet gas than air because interaction potential of carbon dioxide shows more strong attraction than air.
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