Abstract

기존의 불산을 대체할 수 있는 평판디스플레이용 유리의 식각용액을 개발하고자 진행하였다. 본 연구과정을 통해 제안된 불산 대체 유리 식각용액은 산성불화암모늄 18~19 wt%, 황산 24~25 wt%, 물 45~46 wt%, 황산염 4~5 wt%, 규불화염 7~8 wt%로 구성되며, 사용된 식각용액의 재사용 시 보충용액으로서 해당조성의 식각용액을 전체의 5% 되게 보충함으로서 효과적으로 지속적으로 재사용이 가능하다. 개발된 식각용액은 <TEX>$30^{\circ}C$</TEX>에서 <TEX>$5{\mu}m/min$</TEX> 이상의 식각속도를 나타내며, 반복 재사용 시에도 초기 식각액 전체 질량의 5% 추가로 보충함으로서 식각속도는 <TEX>$0.1{\mu}m/min$</TEX> 이하로 편차로 식각속도가 안정적으로 유지되었다. 이 식각공정을 통해 얻어진 평판디스플레이용의 유리의 표면 상태는 Pin hole, Dimple 등이 발견되지 않는 양호한 품질을 나타내었다. The purpose of this research was to develop a flat panel display device's glass etchant which can replace hydrofluoric acid. The glass etchant was composed of 18~19% wt% of ammonium hydrogen fluoride, 24~25 wt% of sulfuric acid, 45~46 wt% of water, 4~5 wt% of sulfate and 7~8 wt% of fluoro-silicate. By replenishing the etchant which has the amount of 5% of initial solution's mass, it was possible to reuse the etchant continuously. The developed etchant showed <TEX>$5{\mu}m/min$</TEX> of etching rate at <TEX>$30^{\circ}C$</TEX>. The reusable etchant, with replenishing 5% of initial etchant mass showed the stable etching rate, which has the deviation of less than <TEX>$0.1{\mu}m/min$</TEX> etching rate. The glass surface of flat panel display device created from our etching process was in good condition with any defects such as pin hole and dimple.

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