Abstract
A numerical simulation on the flow field of a valveless bidirectional piezoelectric micropump has been performed. In this type of micropump, the oscillation of the piezoelectric diaphragm generates the blowing and suction flow through the oblique channel from the pumping chamber. The angle between the oblique and main channel causes the variation of flow distribution through upstream and downstream channels in suction and blowing modes. In the suction flow mode, the working fluid flows from both the upstream and downstream of the main channel to the pumping chamber through the oblique channel. However, in the blowing flow mode, the fluid pushed out of the pumping chamber flows more toward the downstream of the main channel due to the inertia of the fluid. In the present study, the effects of geometries such as the angle of oblique channel and the shape of main channel on the flow rate of the up/downstream were investigated. The flow rate obtained from the pump and the energy required to the pump were also analyzed for various displacements and frequencies of the oscillation of the diaphragm.
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