Abstract
In an environment where ultra-high-precision equipment is used, vibration inevitably occurs due to various factors. These vibrations generate fatal effects, such as defect generation and reduced production yield, on ultra-high-precision production equipment. Among the multiple methods for solving vibration problems, a Tuned Mass Damper (TMD) is a useful technique that reduces vibration without changing the existing structure by attaching a passive dynamic system consisting of additional mass, spring, and damper. However, it is difficult to realize fine-tuning of the system parameters for optimal performance because the passive elements have structural limitations. An active TMD, which has a form wherein sensors, actuators, and a control device are added to the passive TMD structure, was introduced. It has higher performance than passive TMD because dynamic characteristics can be induced to stable and highly damped by a well-designed control algorithm realized by software in the control device. In this study, an active TMD was developed utilizing passive TMD with a voice coil actuator and attached to the center of both end fixed beam that assumed a single-degree-of-freedom structure. A dual-loop control algorithm using a non-minimum phase system was designed for a high-damped response while retaining stability. The modal test was performed for experimental evaluation and excellent performance of active TMD was verified.
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