Abstract
스테인레스 봉입형 압력센서를 제작하기 위하여 먼저 반도체 제조 및 식각 공정을 통하여 반도체 압력센서를 제작하였다 그리고 이를 glass molding된 스테인레스 housing에 올려놓고 <TEX>$50\;{\mu}m$</TEX> 두께의 스테인레스 박판을 용접한 후 실리콘 오일을 채워 넣고 봉입하여 압력 범위 10 bar 센서를 완성하였다. 이와 같이 제작한 센서와 XTR105 발신기 전용 회로를 결합하여 <TEX>$4{\sim}20\;mA$</TEX> 출력의 압력 발신기를 제작하고 그 특성을 조사하였다. 온도 보상 전 정확도는 <TEX>${\pm}5%$</TEX> FS이었으나 보상 후 정확도 <TEX>${\pm}1%$</TEX> FS로 개선되었다. The silicon piezoresistive pressure sensor is made by semiconductor process to obtain stainless steel isolated type pressure sensor. The sensor is loaded on a stainless steel housing with glass molding, <TEX>$50\;{\mu}m$</TEX> stainless steel thin film is welded, and the stainless steel housing encapsulated by silicone oil. The performance of fabricated the pressure sensor has 10 bar pressure range. The XTR105 of exclusive transmitter chip is used the pressure transmitter that output current is 4 - 20 mA. The accuracy is <TEX>${\pm}5%$</TEX> FS, however, the accuracy is <TEX>${\pm}1%$</TEX> FS when the sensor is compensated temperature.
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