Гомогенное зародышеобразование при лазерно-плазмохимическом синтезе твердых покрытий SiCN из гексаметилдисилазана

Abstract

Using a differential aerosol spectrometer (DSA), a study was made of the homogeneous formation of solid phase nuclei in the process of laser-plasmochemical deposition of SiCN from hexamethyldisilazane vapor in a flow of plasma-forming argon gas. It was found that the characteristic size of SiCN nanoparticles in the gas phase is in the range of 20–120 nm and depends on the HMDS vapor concentration and the total argon flow rate. The studies performed have shown that the formation of a layer of silicon carbonitride in laser plasma-chemical deposition proceeds with the formation of nuclei in the gas phase, and upon their collision with the substrate and activation by laser plasma, it leads to the formation of a solid nanostructured coating.