Abstract
Colored tantalum oxy-nitride (TaON) and tantalum nitride (<TEX>$Ta_{3}N_{5}$</TEX>) were synthesized by ammonolysis. Oxygen deficient tantalum oxides (<TEX>$TaO_{1.7}$</TEX>) were produced by a titration process, using a tantalum chloride (<TEX>$TaCl_5$</TEX>) precursor. The stirring speed and the amount of <TEX>$NH_{4}OH$</TEX> were important factors for controling the crystallinity of tantalum oxides. The high crystallinity of tantalum oxides improved the degree of nitridation which was related to the color value. Synthesized powders were characterized by XRD, SEM, TEM and Colorimeter.
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