Структурные и магнитные характеристики однослойных и многослойных наногранулированных пленок Co-Al-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=-, полученных методом твердофазного синтеза

Abstract

AbstractThe results of structural and magnetic investigations of nanogranular Co–Al_2O_3 films formed from Co_3O_4/Al thin-film layered structures upon vacuum annealing are reported. The Co_3O_4/Al films have been obtained by sequential reactive magnetron sputtering of a metallic cobalt target in a medium consisting of the Ar + O_2 gas mixture and magnetron sputtering of an aluminum target in the pure argon atmosphere. It is shown that such a technique makes it possible to obtain nanogranular Co–Al_2O_3 single- and multilayer thin films with a well-controlled size of magnetic grains and their distribution over the film thickness.