Abstract

The disease diagnosis system has been developed using the thin nitride(Si3N4) cantilever arrays which can measure the difference of capacitances between sensor and reference. The system consists of 32-bits RISC(Reduced Instruction Set Computer), RAM/Flash, bus, communication IP's, ADC(Analog Digital Converter) board, and LCD display. The marker selection method, which give us the good accuracy from reasonal numbers of markers, is suggested. The developed system has the resolution under 1fF and can detect 10nM concentration of Thrombin.

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