Abstract
The possibilities of optical microscopy for preliminary and complex analysis of structures, which are used mainly in microelectronics and micromechanics, are demonstrated. Specific examples of the use of optical microscopy for qualitative and quantitative analysis, development of technological processes, control of defects, analysis of surface relief, determination of the parameters of structures are given. Surface measurements are performed in reflected and transmitted light, using bright and dark field modes.
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More From: Nanostructures. Mathematical Physics and Modelling
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