Abstract
An important unit of an electron microscope is the system controlling the electron beam, responsible for raster forming on the specimen and the electron probe focusing, which provides an achievement of minimum of aberrations and the maximum of resolving capacity of formed electron image. During using electron microscope the image quality gradually deteriorates, manifesting the resolving capacity reduction and the astigmatism appearance. An attachment developed for the raster electron microscope, permitting to perform the highly effective diagnostics of the configuration of the scanning electron beam, controlled by a precision magneto-optical system, has been offered. It has been shown that the direct visual observing the scanning electron probe, in particular the evaluation of the ellipticity of its cross-section using the WEB camera matrix, combined with the sample plane, as a result, provides more efficient tuning and repair of the scanning electron microscope.
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