열간나노압입공정을 이용한 극미세 점구조체 제작을 위한 플라스틱소재 판의 기계적 특성 조사

Abstract

It's important to measure quantitative properties about thermal-nano behavior of polymer for producing high quality components using Nanoimprint lithography process. Nanoscale indents can be used to make the cells for molecular electronics and drug delivery, slots for integration into nanodevices, and defects for tailoring the structure and properties. In this study, formability of polymethylmetacrylate(PMMA) and polycarbonate(PC) were characterized Polymer has extreme variation in thermo mechanical variation during forming high temperature. Because of heating the polymer, it becomes softer than at room temperature. In this case it is particularly important to study high temperature-induced mechanical properties of polymer. Nanoindenter XP(MTS) was used to measure thermo mechanical properties of PMMA and PC. Polymer was heated by using the heating stage on NanoXP. At CSM(Continuous Stiffness Method) mode test, heating temperature was <TEX>$110^{\circ}C,120^{\circ}C,130^{\circ}C,140^{\circ}C$</TEX> and <TEX>$150^{\circ}C$</TEX> for PMMA, <TEX>$140^{\circ}C,150^{\circ}C,160^{\circ}C,170^{\circ}C$</TEX> and <TEX>$180^{\circ}C$</TEX> for PC, respectively. Maximum indentation depth was 2000nm. At basic mode test, heating temperature was <TEX>$90^{\circ}C$</TEX> and <TEX>$110^{\circ}C$</TEX> for PMMA, <TEX>$140^{\circ}C,160^{\circ}C$</TEX> for PC. Maximum load was 10mN, 20mN and 40mN. Also indented pattern was observed by using SEM and AFM. Mechanical properties of PMMA and PC decreased when temperature increased. Decrease of mechanical properties from PMMA went down rapidly than that of PC.