Abstract
The magnetic properties of Fe-X-TM-O (X=Y, Nd, Sm,Gd, Tb, Dy: TM=Ni, Pd. Pt) films with a high electrical resistivity prepared by the co-sputtering of Fe, X2O3, and TM targets ate repoted. A uniaxial magnetic anisotropy was induced in these films during deposition in a static magnetic field. Fe46.2Y9.1Pt14.9O29.8 film has a magnetic anisotropy field (Hk) of 52.4 Oe. The film has a good frequency resonance of the permeability up to 500 MHz. The results are attributed to the reduction of eddy current loss resulting from the films' high electrical resistivities and to the higher natural resonance frequency resulting from their high Hk and magnetic induction.
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