매우 작은 크기의 촉매 알갱이를 지지하기 위한 촉매 지지대용 탄소 나노/마이크로 코일의 합성

Abstract

Carbon coils could be synthesized using C₂H₂/H₂ as source gases and SF? as an incorporated additive gas under thermal chemical vapor deposition system. The Ni layer on the SiO₂ substrate was used as a catalyst for the formation of the carbon coils. The characteristics (formation densities, morphologies, and geometries) of the as-grown carbon coils on the substrate with or without the H₂ plasma pretreatment process were investigated. By the relatively short time (1 minute) H₂ plasma pretreatment on the Ni catalyst layered-substrate prior to the carbon coils synthesis reaction, the dominant formation of the carbon microcoils on the substrate could be achieved. After the relatively long time (30 minutes) H₂ plasma pretreatment process, on the other hand, we could obtain the noble-shaped geometrical nanostructures, namely the formation of the numerous carbon nanocoils along the growth of the carbon microcoils. This noble-shaped geometrical nanostructure seemed to play a promising role as the good catalyst support for holding the very tiny Ni catalyst grains.