Dominant Formation of the Microsized Carbon Coils by a Short Time SF6 Flow Incorporation During the Initial Deposition Stage

Abstract

By SF6 gas incorporation for relatively short time during the initial deposition stage, carbon coils could be formed on nickel catalyst layer-deposited silicon oxide substrate using C2H2 and H2 as source gases under thermal chemical vapor deposition system. The characteristics (formation density and morphology) of as-grown carbon coils were investigated as a function of SF6 flow injection time. 5-min SF6 flow injection time is appropriate to produce the dominant microsized geometry for carbon coils without the appearance of the nanosized carbon coils. The geometry for the microsized carbon coils follows a typical double-helix structure and the shape of the rings constituting the coils is a flat-type. Fluorine's intrinsic etching characteristics for the nanosized carbon coils during the initial deposition stage seems to be the cause for the dominant formation of the microsized carbon coils in the case of 5-min SF6 flow injection time.