Особенности формирования слоя положительного заряда при модификации изделий в струе высокочастотного ёмкостного разряда в условиях динамического вакуума

Abstract

The paper presents a physical description of the formation of a layer of positive charge around the body, during processing in a high-frequency capacitive (HF) discharge, due to which a directed flow of ions arises that bombard the surface of the body being processed. With the help of holographic measurements, the presence of a layer, which differs from the plasma of an RF discharge, is demonstrated around a body placed in an RF plasma. The theoretical substantiation of holographic measurements, plasma potentials, measurements of ion energy and ion current density on the surface of the treated body is presented.