Abstract
A retarding field analyzer was used to determine the ion energy, plasma potential, and ion current density of the magnetron plasma. The influence of the particle flux parameters of gas composition, gas pressure, r.f. power, and target geometry was investigated systematically. It is demonstrated by the results that both the plasma potential and the ion current density are hardly affected by the target material, as has been shown for TiN, C, BN, and BCN.At the same r.f. power input, targets of various diameters have various power densities. The plasma potential of a large target of 150 mm diameter is slightly lower than that of a target with a diameter of 76 mm. With increasing r.f. target power the resulting plasma potential will also remain constant, whereas the ion current density will be increased according to theoretical predictions. With an increasing working gas pressure, the plasma potential and ion current density decrease, which is in agreement with the theoretical calculations for both pure argon plasma and an argon/nitrogen gas mixture.
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