To overcome significantly sluggish oxygen-ion conduction in the electrolytes of low-temperature solid-oxide fuel cells (SOFCs), numerous researchers have devoted considerable effort to fabricating the electrolytes as thin as possible. However, thickness is not the only factor that affects the electrolyte performance; roughness, grain size, and internal film stress also play a role. In this study, yttria-stabilized zirconia (YSZ) was deposited via a reactive sputtering process to fabricate high-performance thin-film electrolytes. Various sputtering chamber pressures (5, 10, and 15 mTorr) were investigated to improve the electrolytes. As a result, high surface area, large grain size, and residual tensile stress were successfully obtained by increasing the sputtering pressure. To clarify the correlation between the microstructure and electrolyte performance, a YSZ thin-film electrolyte was applied to anodized aluminum oxide-supported SOFCs composed of conventional electrode materials which are Ni and Pt as the anode and the cathode, respectively. The thin-film SOFC with YSZ deposited at 15 mTorr exhibited the lowest ohmic resistance and, consequently, the highest maximum power density (493 mW/cm2) at 500 °C whose performance is more than five times higher than that of the cell with YSZ deposited at 5 mTorr (94.1 mW/cm2). Despite the basic electrode materials, exceptionally high performance at low operating temperature was achieved via controlling the single fabrication condition for the electrolyte.