We investigated the effect of 0.6 MeV proton irradiation on the superconducting and normal-state properties of thin-film YBa2Cu3O7-δ superconductors. A thin-film YBCO superconductor (≈567 nm thick) was subject to a series of proton irradiations with a total fluence of 7.6×1016 p/cm2. Upon irradiation, Tc was drastically decreased from 89.3 K towards zero with a corresponding increase in the normal-state resistivity above Tc. This increase in resistivity, which indicates an increase in defects inside the thin-film sample, can be converted to the dimensionless scattering rate. We found that the relation between Tc and the dimensionless scattering rate obtained during proton irradiation approximates the generalized d-wave Abrikosov-Gor'kov theory better than the previous results obtained from electron irradiations. This is an unexpected result, since the electron irradiation is known to be most effective to suppress superconductivity over other heavier ion irradiations such as proton irradiation. In comparison with the previous irradiation studies, we found that the result can be explained by two facts. First, the dominant defects created by 0.6 MeV protons can be point-like when the implantation depth is much longer than the sample thickness. Second, the presence of defects on all element sites is important to effectively suppress Tc.
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