X-ray Absorption Spectroscopy Data Research Articles

A Versatile Electrochemical Cell for Operando XAS

AbstractIn situ and operando X‐ray absorption spectroscopy (XAS) provides fundamental insight into the working principles of electrocatalysts and is an important tool for future catalyst development. However, the design of an operando XAS electrocatalytic cell is not facile, and researchers designing cells, whether new cells or modifications to previous cells, often spend many hours on cell design before obtaining high‐quality XAS data. Here, we describe the design, with engineering drawings, and operation of a versatile XAS cell with options for gas flow, electrolyte flow, pH monitoring, temperature monitoring, and the ability to handle many catalyst forms (any catalyst that can be deposited onto a conductive X‐ray transparent substrate). We benchmarked XAS spectra collected using the new experimental cell to a previous cell design showing its ability to produce quality XAS data. We demonstrate the viability of this cell by providing insight into electrocatalysts by studying cation effects and show the tetrabutylammonium cation prevents bulk oxidation of copper. We hope the availability of this cell allows researchers to convert time typically spent on cell design to time spent on breakthroughs in electrocatalysis.

Decoding the Pair Distribution Function of Uranium in Molten Fluoride Salts from X-Ray Absorption Spectroscopy Data by Machine Learning

Decoding the Pair Distribution Function of Uranium in Molten Fluoride Salts from X-Ray Absorption Spectroscopy Data by Machine Learning

Remote Activation of H-H Bonds by Platinum in Dilute Alloy Catalysts.

With heterogeneous catalysts, chemical promotion takes place at their surfaces. Even in the case of single-atom alloys, where small quantities of a reactive metal are dispersed within the main host, it is assumed that both elements are exposed and available to bond with the reactants. Here, we show, on the basis of in situ X-ray absorption spectroscopy data, that in alloy catalysts made from Pt highly diluted in Cu the Pt atoms are located at the inner interface between the metal nanoparticles and the silica support instead. Kinetic experiments indicated that these catalysts still display better selectivity for the hydrogenation of unsaturated aldehydes to unsaturated alcohols than the pure metals. Density functional theory calculations corroborated the stability of Pt at the metal-support interface and explained the catalytic performance as being due to a remote lowering of the activation barrier for the dissociation of H2 at Cu sites by the internal Pt atoms.

Local structure and phase composition of Neodymium-Zircon solid solution (NdxZr1-xSiO4-x/2)

To address the structural stability of host materials for immobilizing radioactive actinides in nuclear waste management applications, the present study is focused on the effect of various concentrations of Nd substitution on structural properties of synthetic zircon (NdxZr1-xSiO4-x/2). To achieve this, both pure and Nd-substituted zircon powders were prepared using the solid-state synthesis route. Rietveld refinement of X-ray Diffraction (XRD) data was employed to investigate the impact of various Nd substitutions on the phase composition of the zircon (ZrSiO4) crystal structure. This refined data was then utilized as input for the analysis of X-ray absorption spectroscopy (XAS) data. The results were further supported by observations from Raman spectroscopy, which indicated the substitution of Zr by Nd. In this work, we present an analysis of both regimes of XAS i.e. X-ray Absorption Near Edge Structure (XANES) and Extended X-ray Absorption Fine Structure (EXAFS) spectroscopy. Qualitative analysis of XANES data suggests that disorder in the samples increases with higher levels of Nd doping. Additionally, EXAFS analysis around Zr absorption edge also confirms an increased disorder in the system with higher Nd doping levels. However, EXAFS fitting around Nd edge indicated that disorder induced changes are more prominent and Nd–O bond is elongated as compared to Zr–O bond. This disorder in the system escalates at a Nd concentration of 10 atomic % (at %). An important finding of this study is the phase composition analysis using Rietveld refinement of XRD data. While XAS provided an insight into the changes in the local structure, the overall crystal structure remained unaffected even at a high doping of 10 at %. This work provides a comprehensive local structure analysis on this system. Such analysis would help in understanding the structural stability of the system and to determining the maximum loading of actinides in the host zircon for potential nuclear waste management applications.

In Solution Identification of the Lysine-Cysteine Redox Switch with a NOS Bridge in Transaldolase by Sulfur K-Edge X-ray Absorption Spectroscopy.

A novel covalent post-translational modification (lysine-NOS-cysteine) was discovered in proteins, initially in the enzyme transaldolase of Neisseria gonorrhoeae (NgTAL) [Nature 2021, 593, 460-464], acting as a redox switch. The identification of this novel linkage in solution was unprecedented until now. We present detection of the NOS redox switch in solution using sulfur K-edge X-ray absorption spectroscopy (XAS). The oxidized NgTAL spectrum shows a distinct shoulder on the low-energy side of the rising edge, corresponding to a dipole-allowed transition from the sulfur 1s core to the unoccupied σ* orbital of the S-O group in the NOS bridge. This feature is absent in the XAS spectrum of reduced NgTAL, where Lys-NOS-Cys is absent. Our experimental and calculated XAS data support the presence of a NOS bridge in solution, thus potentially facilitating future studies on enzyme activity regulation mediated by the NOS redox switches, drug discovery, biocatalytic applications, and protein design.

Iterative Bragg peak removal on X-ray absorption spectra with automatic intensity correction.

This study introduces a novel iterative Bragg peak removal with automatic intensity correction (IBR-AIC) methodology for X-ray absorption spectroscopy (XAS), specifically addressing the challenge of Bragg peak interference in the analysis of crystalline materials. The approach integrates experimental adjustments and sophisticated post-processing, including an iterative algorithm for robust calculation of the scaling factor of the absorption coefficients and efficient elimination of the Bragg peaks, a common obstacle in accurately interpreting XAS data, particularly in crystalline samples. The method was thoroughly evaluated on dilute catalysts and thin films, with fluorescence mode and large-angle rotation. The results underscore the technique's effectiveness, adaptability and substantial potential in improving the precision of XAS data analysis. While demonstrating significant promise, the method does have limitations related to signal-to-noise ratio sensitivity and the necessity for meticulous angle selection during experimentation. Overall, IBR-AIC represents a significant advancement in XAS, offering a pragmatic solution to Bragg peak contamination challenges, thereby expanding the applications of XAS in understanding complex materials under diverse experimental conditions.

Reduction of Cofed Carbon Dioxide Modifies the Local Coordination Environment of Zeolite-Supported, Atomically Dispersed Chromium to Promote Ethane Dehydrogenation.

The reduction of CO2 is known to promote increased alkene yields from alkane dehydrogenations when the reactions are cocatalyzed. The mechanism of this promotion is not understood in the context of catalyst active-site environments because CO2 is amphoteric, and even general aspects of the chemistry, including the significance of competing side reactions, differ significantly across catalysts. Atomically dispersed chromium cations stabilized in highly siliceous MFI zeolite are shown here to enable the study of the role of parallel CO2 reduction during ethylene-selective ethane dehydrogenation. Based on infrared spectroscopy and X-ray absorption spectroscopy data interpreted through calculations using density functional theory (DFT), the synthesized catalyst contains atomically dispersed Cr cations stabilized by silanol nests in micropores. Reactor studies show that cofeeding CO2 increases stable ethylene-selective ethane dehydrogenation rates over a wide range of partial pressures. Operando X-ray absorption near-edge structure (XANES) and extended X-ray absorption fine-structure (EXAFS) spectra indicate that during reaction at 650 °C the Cr cations maintain a nominal 2+ charge and a total Cr-O coordination number of approximately 2. However, CO2 reduction induces a change, correlated with the CO2 partial pressure, in the population of two distinct Cr-O scattering paths. This indicates that the promotional effect of parallel CO2 reduction can be attributed to a subtle change in Cr-O bond lengths in the local coordination environment of the active site. These insights are made possible by simultaneously fitting multiple EXAFS spectra recorded in different reaction conditions; this novel procedure is expected to be generally applicable for interpreting operando catalysis EXAFS data.

Structural and electronic transformations of GeSe2 glass under high pressures studied by X-ray absorption spectroscopy

Pressure-induced transformations in an archetypal chalcogenide glass (GeSe2) have been investigated up to 157 GPa by X-ray absorption spectroscopy (XAS) and molecular dynamics (MD) simulations. Ge and Se K-edge XAS data allowed simultaneous tracking of the correlated local structural and electronic changes at both Ge and Se sites. Thanks to the simultaneous analysis of extended X-ray absorption fine structure (EXAFS) signals of both edges, reliable quantitative information about the evolution of the first neighbor Ge-Se distribution could be obtained. It also allowed to account for contributions of the Ge-Ge and Se-Se bond distributions (chemical disorder). The low-density to high-density amorphous-amorphous transformation was found to occur within 10 to 30 GPa pressure range, but the conversion from tetrahedral to octahedral coordination of the Ge sites is completed above [Formula: see text] 80 GPa. No convincing evidence of another high-density amorphous state with coordination number larger than six was found within the investigated pressure range. The number of short Ge-Ge and Se-Se "wrong" bonds was found to increase upon pressurization. Experimental XAS results are confirmed by MD simulations, indicating the increase of chemical disorder under high pressure.

ProSPyX: software for post-processing images of X-ray ptychography with spectral capabilities.

X-ray ptychography is a coherent diffraction imaging technique based on acquiring multiple diffraction patterns obtained through the illumination of the sample at different partially overlapping probe positions. The diffraction patterns collected are used to retrieve the complex transmittivity function of the sample and the probe using a phase retrieval algorithm. Absorption or phase contrast images of the sample as well as the real and imaginary parts of the probe function can be obtained. Furthermore, X-ray ptychography can also provide spectral information of the sample from absorption or phase shift images by capturing multiple ptychographic projections at varying energies around the resonant energy of the element of interest. However, post-processing of the images is required to extract the spectra. To facilitate this, ProSPyX, a Python package that offers the analysis tools and a graphical user interface required to process spectral ptychography datasets, is presented. Using the PyQt5 Python open-source module for development and design, the software facilitates extraction of absorption and phase spectral information from spectral ptychographic datasets. It also saves the spectra in file formats compatible with other X-ray absorption spectroscopy data analysis software tools, streamlining integration into existing spectroscopic data analysis pipelines. To illustrate its capabilities, ProSPyX was applied to process the spectral ptychography dataset recently acquired on a nickel wire at the SWING beamline of the SOLEIL synchrotron.

Open-source electrochemical cell for in situ X-ray absorption spectroscopy in transmission and fluorescence modes.

X-ray spectroscopy is a valuable technique for the study of many materials systems. Characterizing reactions in situ and operando can reveal complex reaction kinetics, which is crucial to understanding active site composition and reaction mechanisms. In this project, the design, fabrication and testing of an open-source and easy-to-fabricate electrochemical cell for in situ electrochemistry compatible with X-ray absorption spectroscopy in both transmission and fluorescence modes are accomplished via windows with large opening angles on both the upstream and downstream sides of the cell. Using a hobbyist computer numerical control machine and free 3D CAD software, anyone can make a reliable electrochemical cell using this design. Onion-like carbon nanoparticles, with a 1:3 iron-to-cobalt ratio, were drop-coated onto carbon paper for testing in situ X-ray absorption spectroscopy. Cyclic voltammetry of the carbon paper showed the expected behavior, with no increased ohmic drop, even in sandwiched cells. Chronoamperometry was used to apply 0.4 V versus reversible hydrogen electrode, with and without 15 min of oxygen purging to ensure that the electrochemical cell does not provide any artefacts due to gas purging. The XANES and EXAFS spectra showed no differences with and without oxygen, as expected at 0.4 V, without any artefacts due to gas purging. The development of this open-source electrochemical cell design allows for improved collection of in situ X-ray absorption spectroscopy data and enables researchers to perform both transmission and fluorescence simultaneously. It additionally addresses key practical considerations including gas purging, reduced ionic resistance and leak prevention.

Stability of iron single atoms in graphene structures from X-ray absorption spectroscopy data

Fe-intercalated graphene nanoflakes were heated to 80 °C with nitric acid and XAS spectra at different stages of the oxidation were collected and analyzed.

Effect of Dissolved Gases on Pt Nanoparticle Catalysts Investigated By in Situ SAXS, XAS Measurements

Understanding of the structural and the chemical properties of Pt catalysts in polymer electrolyte fuel cells (PEFCs) is necessary to improve the activity for the durability of the catalysts. The small-angle X-ray scattering (SAXS) and the X-ray absorption spectroscopy (XAS) measurements are widely used to investigate these properties. We developed a system that combines in situ A-SAXS/XAS measurements in the same field of observation using a channel flow electrode (CFE) cell and characterized the chemical states, average diameter and size distributions of Pt catalysts under controlled electrochemical conditions. In this study, we investigated an effect of dissolved gases on Pt nanoparticle catalysts using the system.All experiments were carried out at SPring-8 BL19B2. A commercial Pt/carbon black catalyst (TEC10E50E, Tanaka Kikinzoku Kogyo) was used as test electrode in this experiment. Prior to SAXS and XAS measurements, the electrochemical potential was cycled between 0.6 and 1.0 V vs. the RHE in O2 or N2-saturated 0.1 M HClO4. For the XAS measurements, the Pt LⅢ edge was used. The ionization chamber and a seven-elements silicon drift detector were used to obtain the XAS spectra. For the SAXS measurements, the X-ray energy was set to 11.5 keV and 11.55 keV, which are below and near to the Pt LIII absorption edge, respectively. The scattered X-ray was detected using an area detector (PILATUS 2M). Figure 1 show the X-ray absorption near edge structure (XANES) spectra of the Pt catalyst after the potential cycles in O2-saturated 0.1 M HClO4. The white-line peak intensity increased and became higher at a higher potential cycle. This indicates the partial electron-transfer from Pt atoms or initial stage of Pt oxidation. We also will discuss the effect of dissolved gases for morphological and chemical states from SAXS and XAS data. Figure 1

Manganese cycling and transport in boreal estuaries impacted by acidic Mn-rich drainage

As critical transition zones between the land and the sea, estuaries are not only hotspots of hydrogeochemical and microbial processes/reactions, but also play a vital role in processing and transferring terrestrial fluxes of metals and nutrients to the sea. This study focused on three estuaries in the Gulf of Bothnia. All of them experience frequent inputs of acidic and Mn/metal-rich creek waters due to flushing of acid sulfate soils that are widespread in the creekś catchments. Analyzing existing long-termwaterchemistrydata revealed a strong seasonal variation of Mn loads, with the highest values in spring (after snow melt) and autumn (after heavy rains). We sampled surface waters, suspended particulate matter (SPM), and sediments from the estuarine mixing zones and determined the loads and solid-phase speciation of Mn as well as the composition and metabolic potentials of microbial communities. The results showed that the removal, cycling, and lateral transport of Mn were governed by similar phases and processes in the three estuaries. Manganese X-ray absorption spectroscopy data of the SPM suggested that the removal of Mn was regulated by silicates (e.g., biotite), organically complexed Mn(II), and MnOx (dominated by groutite and phyllomanganates). While the fractional amounts of silicate-bound Mn(II) were overall low and constant throughout the estuaries, MnOx was strongly correlated with the Mn loadings of the SPM and thus the main vector for the removal of Mn in the central and outer parts of the estuaries, along with organically complexed Mn(II). Down estuary, both the fractional amounts and average Mn oxidation state of the MnOx phases increased with (i) the total Mn loads on the SPM samples and (ii) the relative abundances of several potential Mn-oxidizing bacteria (Flavobacterium, Caulobacter, Mycobacterium, and Pedobacter) in the surface waters. These features collectively suggested that the oxidation of Mn, probably mediated by the potential Mn-oxidizing microorganisms, became more extensive and complete towards the central and outer parts of the estuaries. At two sites in the central parts of one estuary, abundant phyllomanganates occurred in the surface sediments, but were converted to surface-sorbed Mn(II) phases at deeper layers (>3–4 cm). The occurrence of phyllomanganates may have suppressed the reduction of sulfate in the surface sediments, pushing down the methane sulfate transition zone that is typically shallow in estuarine sediments. At the outermost site in the estuary, deposited MnOx were reduced immediately at the water–sediment interface and converted most likely to Mn carbonate. The mobile Mn species produced by the Mn reduction processes (e.g., aqueous Mn(II) and ligand complexed Mn(III)) could partly diffuse into the overlying waters and, together with the estuarine Mn loads carried by the surface waters, transfer large amounts of reactive Mn into open coastal areas and subsequently contribute to Mn shuttling and inter-linked biogeochemical processes over the seafloor. Given the widespread occurrence of acid sulfate soils and other sulfidic geological materials on many coastal plains worldwide, the identified Mn attenuation and transport mechanisms are relevant for many estuaries globally.

Probing the Electronic Properties of Cu and CuO Thin Films via XANES utilizing Powder XRD System

This research introduces an alternative approach on materials characterization by developing an in-house X-ray Absorption Spectroscopy (XAS) system utilizing powder X-ray Diffraction (XRD) machine. The performance of the in-house XAS system was investigated by analysing the position of Cu K-edge and the absorption spectrum shape within the X-ray Absorption Near Edge Structure (XANES) region. Copper (Cu) based samples were used to test the performance of the system where Cu and Copper Oxide (CuO) thin film deposited on polyimide tape and silicon wafer (100) prepared through the deposition process carried out using RF Magnetron Sputtering machine. Phase confirmation analysis were conducted by XRD and the deposited films’ thickness were measured by Scanning Electron Microscope (SEM). The laboratory-based XAS measurement was carried out using Rigaku SmartLab X-ray Diffractometer configured for Bragg-Brentano (BB) measurement mode. Molybdenum (Mo) target was used to produce white X-rays by energizing it near 20 keV ±0.01 keV. XRD measurements on XRD and SEM analysis proves successful deposition of pure Cu and CuO thin films and the film thickness measured is 1.432 μm and 0.680 μm respectively. The conclusive findings of the laboratory-based XAS measurements indicate successful acquisition of XAS data with similar spectrum shape of experimental Cu and CuO XANES in comparison with theoretical data. Next, experimental XANES shows clear observation of Cu K-edge peaks for Cu thin film at 8.9737 keV, while Cu K-edge for CuO thin films is not observable. Lastly, there is also presence of significant XANES broadening and which then effect consequent peak shiftings.

Local structure and ordering of Al atoms in AlxGa1−xN epilayers

In this study, we investigate the local structure of aluminum (Al) in a comprehensive series of AlxGa1−xN epilayers, where the Al concentration spans from the dilute limit to 100%. We analyze grazing incidence Al K-edge tender x-ray absorption spectroscopy data using both linear combination fitting based on reference limit spectra and full quantitative analysis. The results indicate deviations from random cation distribution with varying signs within the explored concentration range. Additionally, we observe a reduction in cationic interatomic distances over a wide concentration range, which contrasts with some previous studies conducted at hard x-ray absorption edges.

Probing the Local Structure of Na in NaNO3-Promoted, MgO-Based CO2 Sorbents via X-ray Absorption Spectroscopy.

This work provides insight into the local structure of Na in MgO-based CO2 sorbents that are promoted with NaNO3. To this end, we use X-ray absorption spectroscopy (XAS) at the Na K-edge to interrogate the local structure of Na during the CO2 capture (MgO + CO2 ↔ MgCO3). The analysis of Na K-edge XAS data shows that the local environment of Na is altered upon MgO carbonation when compared to that of NaNO3 in the as-prepared sorbent. We attribute the changes observed in the carbonated sorbent to an alteration in the local structure of Na at the NaNO3/MgCO3 interfaces and/or in the vicinity of [Mg2+···CO32-] ionic pairs that are trapped in the cooled NaNO3 melt. The changes observed are reversible, i.e., the local environment of NaNO3 was restored after a regeneration treatment to decompose MgCO3 to MgO. The ex situ Na K-edge XAS experiments were complemented by ex situ magic-angle spinning 23Na nuclear magnetic resonance (MAS 23Na NMR), Mg K-edge XAS and X-ray powder diffraction (XRD). These additional experiments support our interpretation of the Na K-edge XAS data. Furthermore, we develop in situ Na (and Mg) K-edge XAS experiments during the carbonation of the sorbent (NaNO3 is molten under the conditions of the in situ experiments). These in situ Na K-edge XANES spectra of molten NaNO3 open new opportunities to investigate the atomic scale structure of CO2 sorbents modified with Na-based molten salts by using XAS.

Reducibility of Cu-zeolites and stability of Cu+ monocarbonyl adducts: Qualitative and quantitative relationships from MCR-XAS and DFT

A series of Cu-exchanged zeolites differing in framework topology and composition are studied through in situ X-ray Absorption Spectroscopy (XAS) to highlight differences in reducibility depending on the characteristics of the different samples. After reduction at high temperature in NH3, the samples are exposed to CO at 50 °C followed by a temperature-programmed desorption to study the different stability of carbonyl species forming on the Cu+ sites. Multivariate Curve Analysis applied to the XAS data allows extracting concentration profiles and pure spectral profiles on the species involved during several steps of the reaction. While all the samples are quantitatively reduced after treatment in NH3, the stability of the [Cu(CO)]+ sites shows a dependence on the topology of the materials. DFT calculations on possible sites occupied by Cu in the different frameworks are consistent with the stability trends observed experimentally and, together with isothermal volumetric CO adsorption data, confirm the particular instability of the Cu+-monocarbonyls formed in the CHA framework.

Stable and oxidative charged Ru enhance the acidic oxygen evolution reaction activity in two-dimensional ruthenium-iridium oxide

The oxygen evolution reactions in acid play an important role in multiple energy storage devices. The practical promising Ru-Ir based catalysts need both the stable high oxidation state of the Ru centers and the high stability of these Ru species. Here, we report stable and oxidative charged Ru in two-dimensional ruthenium-iridium oxide enhances the activity. The Ru0.5Ir0.5O2 catalyst shows high activity in acid with a low overpotential of 151 mV at 10 mA cm−2, a high turnover frequency of 6.84 s−1 at 1.44 V versus reversible hydrogen electrode and good stability (618.3 h operation). Ru0.5Ir0.5O2 catalysts can form more Ru active sites with high oxidation states at lower applied voltages after Ir incorporation, which is confirmed by the pulse voltage induced current method. Also, The X-ray absorption spectroscopy data shows that the Ru-O-Ir local structure in two-dimensional Ru0.5Ir0.5O2 solid solution improved the stability of these Ru centers.

Molecular-scale characterization of groundwater treatment sludge from around the world: Implications for potential arsenic recovery

Iron (Fe)-based treatment methods are widely applied to remove carcinogenic arsenic (As) from drinking water, but generate toxic As-laden Fe (oxyhydr)oxide waste that has traditionally been ignored for resource recovery by the water sector. However, the European Commission recently classified As as a Critical Raw Material (CRM), thus providing new incentives to re-think As-laden groundwater treatment sludge. Before As recovery techniques can be developed for groundwater treatment waste, detailed information on its structure and composition is essential. To this end, we comprehensively characterized sludge generated from a variety of As-rich groundwater treatment plants in different geographic regions by combining a suite of macroscopic measurements, such as total digestions, leaching tests and BET surface area with molecular-scale solid-phase analysis by Fe and As K-edge X-ray absorption spectroscopy (XAS). We found that the As mass fraction of all samples ranged from ∼200–1200 mg As/kg (dry weight) and the phosphorous (P) content reached ∼0.5–2 mass%. Notably, our results indicated that the influent As level was a poor predictor of the As sludge content, with the highest As mass fractions (940–1200 mg As/kg) measured in sludge generated from treating low groundwater As levels (1.1–22 µg/L). The Fe K-edge XAS data revealed that all samples consisted of nanoscale Fe(III) precipitates with less structural order than ferrihydrite, which is consistent with their high BET surface area (up to >250 m2/g) and large As and P mass fractions. The As K-edge XAS data indicated As was present in all samples predominantly as As(V) bound to Fe(III) precipitates in the binuclear-corner sharing (2C) geometry. Overall, the similar structure and composition of all samples implies that As recovery methods optimized for one type of Fe-based treatment sludge can be applied to many groundwater treatment sludges. Our work provides a critical foundation for further research to develop resource recovery methods for As-rich waste.

Tweaking the mechanical stability of Al1−xWxN ternary nitride alloys for hard coating applications, and study on their structural, photoluminescence and surface chemical analysis

This study focuses on the synthesis and achievement of ternary Al1−xWxN nitride films as hard coating materials. A dual-target DC reactive magnetron sputtering process was used to coat Al1−xWxN thin films on Si (100), glass, and transparent quartz substrates. The elemental analysis of the films was calculated by energy dispersion spectroscopy and the corresponding value of x changes from 0 to 1. The X-ray diffraction data showed a-axis orientation of the AlN films with hexagonal phase and amorphous nature for Al0.78W0.22N and Al0.58W0.42N films. Atomic force microscopy analysis showed that the surface morphology of Al0.78W0.22N films was better than that of AlN and Al0.3W0.7N films, as evidenced by the significantly lower root-mean-square roughness value of 1.79 nm compared to 5.78 and 13.9 nm, respectively. The resistivity of Al1−xWxN films was determined by a four-probe method and resulted in a record low value of 4.08 × 10−5 Ω-m for WN films. The photoluminescence emission spectra showed distinct peaks in the visible region at different wavelengths, and the deconvoluted blue emission peak was attributed to the native defects in the Al1−xWxN films. X-ray absorption spectroscopy data showed an increase in feature-a from Al0.78W0.22N to Al0.58W0.42N films, indicating stronger hybridization of N 2p with Al 3p and W 5d orbitals due to π * -resonance. The oxygen content calculated by X-ray photoelectron spectroscopy was 34.6, 35.39, and 19.74 at% on the surface of AlN, Al0.58W0.42N, and WN films, respectively. The surface oxidation of AlN films triggered the transfer of charge from nitrogen to oxygen on the surface of AlN films. The nanoindentation results showed that the Al0.3W0.7N films have hardness and elastic modulus of 17.84 GPa and 196.96 GPa, which are higher than those of the other Al1−xWxN films, while the AlN films have higher fracture toughness due to the reduction of contact pressure.