Super-oscillatory lens (SOL), a new type of planar optical element developed in recent years, may play an important role in the integrated optics, microscopy, advanced sensor, and astronomy. Based on the vectorial angular spectrum theory and genetic algorithm, both binary amplitude-type and phase-type SOLs are designed. Various sub-diffraction focusing properties can be realized by optimizing the design procedure. In order to investigate the focusing characteristics of SOLs under different illumination conditions, rigorous electromagnetic simulation calculations of the diffracted focusing light field are implemented by the finite-difference time-domain method. The results show that when the beam waist radius <i>w</i><sub>0</sub> of the illuminating laser is less than the SOL radius <i>a</i>, not only the capability of super-diffraction limit focusing will decrease significantly, but also the intensity of the focal spot will attenuate by more than 50%. Comparing with the amplitude-type SOL, the waist radius <i>w</i><sub>0</sub> has a strong effect on the phase-type SOL and causes a significant focus to shift in the positive direction. However, if <i>w</i><sub>0</sub> is larger than 2<i>a</i>, the ideal focusing characteristics of SOL can be maintained. Under the condition of oblique illumination, the high numerical aperture amplitude-type SOL generally only allows a small inclination angle of less than 10°, while the phase-type SOL has a wide inclination adaptability (can exceed 40°) regardless of the numerical aperture. For the latter, the focal spot will expand laterally and the intensity will decrease sharply with the increase of inclination angle. As for low numerical aperture phase-type SOL, the focusing characteristics, including focal spot size, focusing intensity and the angular position of the focus, can keep stable within an inclination angle of 18°. For imaging infinitely distant objects, the oblique illumination will produce a fluctuating field curvature and significant negative distortion for high numerical aperture SOLs, while for the low numerical aperture SOLs, the field curvature increases with inclination angle increasing and the distortion disappears almost. The research results of this paper provide an important theoretical basis for practical applications of super-oscillatory lens in the fields of sub-diffraction light focusing, super-resolution microscopic imaging, and micro-nano processing of femtosecond laser direct writing.
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